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JEL Sorter System

A buffer function has been implemented in the Alaina, allowing for wafer replacement.

The sorter system complies with SEMI Standards (E15.1-0600, E57-0600, E62-0999, E63-0600, E64-0600). It features a buffer function in the aligner, enabling wafer exchange and achieving high throughput. With the built-in ID reader, it is possible to read the wafer ID (front and back support is optional). For more details, please contact us or refer to the catalog.

  • Transport and handling robots
  • Other industrial robots

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